Myfab – Nanofabrication Tools

Myfab is, since 2010, the national research infrastructure for micro- and nanofabrication with open access cleanroom facilities at Chalmers, KTH, Lund and Uppsala.

It is an excellent environment for micro- and nano fabrication of materials and device structures for advanced research in physics, materials science, nanoscience, chemistry, life sciences and nanoelectronics, with more than 800 peer-reviewed publications and more than 50 PhD students emerging annually.

The quality and significance are supported by the fact that Myfab’s application received exceptional top marks in all categories in the VR infrastructure call evaluation 2019 and was ranked the highest among the 27 infrastructure applications.

The panel concluded that the national impact of Myfab on forefront science and engineering is invaluable for a large number of research fields performing international cutting-edge research and development.In that application, we presented an urgent need for extensive equipment investments of 340 MSEK.

This was recognised by VR, but the budget constraints at that time only allowed a 30% coverage (105 MSEK) of the total investment budget applied for.

This has enabled us to start working on narrowing the gap towards having comprehensive, state-of-art processes at each node.

Now that the VR infrastructure development program has been extended in 2021, we can envisage Myfab moving much closer to achieving this goal.The tools motivated in this application will, in different ways, further strengthen the profiles of the Myfab nodes, and simultaneously support the whole Myfab user collective with available back-up processes or unique processes available only at a single node for all to use.

The prioritised investments are targeted at developing the national infrastructure by adding completely new processes and techniques and by replacing ageing and outdated hardware with state-of-the-art equipment, thus enabling excellent science in a large number of research fields.