Enabling Functional Material analysis by development of a novel hard X-ray microscopy setup

Purpose and goal:

The EMaX project succesfully demonstrated very-high-resolution projection X-ray microscopy at higher energy (24 keV) than previously available with lab-based systems as published in “Laboratory X-ray Microscopy of 3D Nanostructures in the Hard X-ray Regime Enabled by a Combination of Multilayer X-ray Optics” (https://doi.org/10.3390/nano14020233).

Expected results and effects: The project successfully demonstrated 24keV X-ray microscopy and its performance on relevant semiconductor samples. Approach and implementation:

There was a smooth communication and overall good collaboration between all partners of the Swedish-German consortium during project implementation.