A Quantitative Model for Green CVD

Thin films form the basis of all electronic components and hard coatings on tools. Thin films are often deposited by chemical vapor deposition (CVD).

In CVD, molecules, containing the atoms needed for the material, react above and on the surface where a thin film is wanted.

High temperatures, typically 800-1500 °C, are used to activate the chemistry, often also a low pressure is needed, making CVD very energy consuming.Surprisingly, there is no research on how to make CVD more sustainable.

This project aims to study how to create more sustainable CVD-processes by reducing the energy consumption, increase the molecule utilization and reduce the generation of waste products.

The project seeks to establish Green CVD as a philosophy for more sustainable CVD.The project will (1) make a detailed analysis of a CVD process and identify where the usage of energy and molecules can improve, and (2) create an advanced digital model of a CVD reactor based on calculations of gas flows and chemical reactions.

The model will supply the project with a more detailed information for the analysis of the CVD process and the possibility to test solutions on how CVD can be made less energy consuming.The project has the possibility to establish sustainable CVD as a new research field and can thus contribute to more sustainable production of electronics.

The project can also strengthen Swedish industry by creating more sustainable production by reducing the usage of resources.