Commercial Production of Quantum Computing Components

Purpose and goal:

The goal of this project is to perform a full and consistent cause-and-effect analysis to identify unnecessary process steps to improve efficiency in qubit production. In parallel, it is necessary to scale up this production to large wafer sizes, while maintaining process reliability and yield. This increases the number of devices by up to 400% with the similar costs, which significantly increases the profit as well as

increases the availability Expected results and effects: Scale up to 4-inch wafers, increasing useable wafer area by 400% and thereby the number of potential devices per wafer.

Determine and reduce the fabrication-induced uncertainties in the process. Especially, pushing the resistance variation of the Josephson junctions below 5% on a 4-inch wafer. Measure the effects of device aging and reduce the post process aging effect below 5%. Reduce the usage of toxic chemicals to improve sustainability of the process.

Approach and implementation:

The whole project is divided in 6 work packages to address the improvements needed to enhance the current high quality research type process from lab scale to a commercial scale meeting the market needs. The work pages are as follows: WP1: Process enhancements WP2: scaling of the process to 4-inch wafers

WP3: Fabrication of customer samples WP4: Chemical safety WP5: JJ verification WP6: Project management