Ultraprecise Semiconductor Nanofabrication For Nanoelectronics With Minimal Environmental Footprint

Purpose and goal:

The semiconductor industry is pivotal to the modern global economy; however, this industry confronts pressing challenges, including sustainability concerns, and technical constraints inherent in current nanofabrication methods. This project, is a collaboration between AlixLabs and Halmstad University, and is dedicated to advancing AlixLabs patented APS technology for energy-efficient and environmentally friendly fabrication of advanced semiconductors.

Expected results and effects:

We intend to develop and broaden the applications of AlixLabs patented APS process platform by (i) Ultrafine Nanofabrication: Achieving sub-10 nm semiconductor lines using APS, (ii) Improve Line Edge Roughness by utilizing advanced ALE technology, (iii) enable sustainable manufacturing by developing cost-effective and eco-friendly methods for high throughput chip production in Europe. This would enable novel nanofabrication techniques that meet the requirements for advanced semiconductor architectures.

Approach and implementation:

The project is a collaboration between AlixLabs and Halmstad University which will jointly work together to improve Alixlabs APS technology. Alixlabs will be working on the development of sub-10nm structures by APS, improvement of the Line Edge Roughness and validation of the technology on an industry-standard platform. Halmstad University will contribute with technical expertise and evaluate the environmental impact of APS technology taking into account energy and water consumption as well as greenhouse gas emissions.