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Completed INFRASTRUCTURE Swiss National Science Foundation

ICP–CVD of silicon nitride and silicon oxide for novel integrated photonics and MEMS devices

$32.65M CHF
Funder Swiss National Science Foundation
Recipient Organization Epf Lausanne – Epfl
Country Switzerland
Start Date Mar 01, 2021
End Date Aug 31, 2022
Duration 548 days
Number of Grantees 1
Roles Principal Investigator
Data Source Swiss National Science Foundation
Grant ID 206021_198164
Grant Description

Si3N4 integrated photonics

All Grantees

Epf Lausanne – Epfl

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Quick Summary
Start Year 2021
End Year 2022
Grantees 1
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