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Completed KNOWLEDGE TRANSFER PARTNERSHIP UKRI Gateway to Research

University of York and Oxford Instruments Nanotechnology Tools Limited

£981.5K GBP

Funder Innovate UK
Recipient Organization University of York
Country United Kingdom
Start Date Apr 30, 2021
End Date Apr 29, 2023
Duration 729 days
Data Source UKRI Gateway to Research
Grant ID 512022
Grant Description

To achieve greater yields from semiconductor wafers produced using plasma processing by incorporating structured electrodes into the reactor.

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